Presentation 2003/5/19
Fabrication of a Multi-Layered Mirror by Spin Coating of Polymers
Toshiyuki KOMIKADO, Takashi FUJIHARA, Azusa INOUE, Shinsuke UMEGAKI,
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Abstract(in English) Abstract In general, inorganic dielectric materials are being used to fabricate multi-layer-coated mirrors. Their fabricating methods are almost all based on vacuum evaporation or vacuum sputtering, whose apparatus cost so high. On the other hand, polymeric thin-films such as photo-resists and planar waveguides can be easily obtained by spin coating and casting. In this study, we report the results of fabrication of multi-layer-coated mirrors by spin coating of two different polymers.
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Keyword(in English) polymeric multi-layered structure / multi-layered mirror / spin coating
Paper # OME2003-17
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Committee OME
Conference Date 2003/5/19(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of a Multi-Layered Mirror by Spin Coating of Polymers
Sub Title (in English)
Keyword(1) polymeric multi-layered structure
Keyword(2) multi-layered mirror
Keyword(3) spin coating
1st Author's Name Toshiyuki KOMIKADO
1st Author's Affiliation Faculty of Science & Technology, Keio University()
2nd Author's Name Takashi FUJIHARA
2nd Author's Affiliation Faculty of Science & Technology, Keio University
3rd Author's Name Azusa INOUE
3rd Author's Affiliation Faculty of Science & Technology, Keio University
4th Author's Name Shinsuke UMEGAKI
4th Author's Affiliation Faculty of Science & Technology, Keio University
Date 2003/5/19
Paper # OME2003-17
Volume (vol) vol.103
Number (no) 84
Page pp.pp.-
#Pages 6
Date of Issue