| 講演名 | 2004/1/13 Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering , |
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| 抄録(英) | A new carbon gold sulfide (C-Au-S) film was formed by co-operation process of plasma CVD of CH_4, SF_6 and Ar mixture gas and sputtering of gold. X-ray diffraction spectra of C-Au-S film and chemical shift of C, Au and S atom shows that the gold atom in the film is atomically distributed and chemically bonded with sulfur and carbon. The refractive index of the C-Au-S film was measured to be 2.5～3.3, however this value was apparently small compared to the expected value from the electronic polarizability and the atomic composition of C, Au and S. Because of this kind of inconsistent result, it was supposed that the film contains conductive C-Au-S granular molecules. Quadrupole mass (Q-Mass) spectra during co-operation process of plasma CVD and sputtering were measured to study carbon gold sulfide (C-Au-S) film deposition kinetics. Unexpectedly C-Au-S molecule was detected, this fact confirmed that HF dissociation from the source mixture gas and C-Au-S molecule formation is important reaction for C-Au-S film formation. |
| キーワード(和) | |
| キーワード(英) | Q-Mass spectroscopy / co-operation process of plasma CVD and sputtering / HF dissociation / carbon gold sulfide |
| 資料番号 | OME2003-114 |
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| 研究会情報 | |
| 研究会 | OME |
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| 開催期間 | 2004/1/13(から1日開催) |
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| 申込み研究会 | Organic Material Electronics (OME) |
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| 本文の言語 | ENG |
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| タイトル（英） | Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering |
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| キーワード(1)（和/英） | / Q-Mass spectroscopy |
| 第 1 著者 氏名（和/英） | / Md. Abul Kashem |
| 第 1 著者 所属（和/英） | Department of Electronics, Graduate School of Engineering, Nagoya University |
| 発表年月日 | 2004/1/13 |
| 資料番号 | OME2003-114 |
| 巻番号（vol） | vol.103 |
| 号番号（no） | 565 |
| ページ範囲 | pp.- |
| ページ数 | 6 |
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