| Presentation | 2004/1/13 Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering Md. Abul Kashem, Shinzo Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new carbon gold sulfide (C-Au-S) film was formed by co-operation process of plasma CVD of CH_4, SF_6 and Ar mixture gas and sputtering of gold. X-ray diffraction spectra of C-Au-S film and chemical shift of C, Au and S atom shows that the gold atom in the film is atomically distributed and chemically bonded with sulfur and carbon. The refractive index of the C-Au-S film was measured to be 2.5～3.3, however this value was apparently small compared to the expected value from the electronic polarizability and the atomic composition of C, Au and S. Because of this kind of inconsistent result, it was supposed that the film contains conductive C-Au-S granular molecules. Quadrupole mass (Q-Mass) spectra during co-operation process of plasma CVD and sputtering were measured to study carbon gold sulfide (C-Au-S) film deposition kinetics. Unexpectedly C-Au-S molecule was detected, this fact confirmed that HF dissociation from the source mixture gas and C-Au-S molecule formation is important reaction for C-Au-S film formation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Q-Mass spectroscopy / co-operation process of plasma CVD and sputtering / HF dissociation / carbon gold sulfide |
| Paper # | OME2003-114 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2004/1/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Q-Mass Study on C-Au-S Film Formation by Co-operation Process of Plasma CVD and Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Q-Mass spectroscopy |
| Keyword(2) | co-operation process of plasma CVD and sputtering |
| Keyword(3) | HF dissociation |
| Keyword(4) | carbon gold sulfide |
| 1st Author's Name | Md. Abul Kashem |
| 1st Author's Affiliation | Department of Electronics, Graduate School of Engineering, Nagoya University() |
| 2nd Author's Name | Shinzo Morita |
| 2nd Author's Affiliation | Department of Electronics, Graduate School of Engineering, Nagoya University |
| Date | 2004/1/13 |
| Paper # | OME2003-114 |
| Volume (vol) | vol.103 |
| Number (no) | 565 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |