| Presentation | 2003/6/27 Ultrasonic Micro Array Sensors Using Piezoelectric Thin Films and Resonant Frequency Tuning Kaoru YAMASHITA, Latpasamixay CHANSOMPHOU, Hideyuki MURAKAMI, Masanori OKUYAMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Air-borne ultrasonic micro array sensors for three-dimensional imaging have been developed using sol-gel derived PZT (Pb(Zr,Ti)O_3) thin films on silicon-micromachined diaphragms. The array sensor just after fabricated has scattered resonant frequencies of its elements due to non-uniformity of element size and material properties. The sensor having scattering range of 12% in resonant frequency could not realize three-dimensional measurement. Adjustment methods for the resonant frequency after the fabrication have been developed; electrical poling to the piezoelectric layer and additional mass using inkjet printing. Resonant frequency shifts up to 8% by electrical poling of less than 10 V, or shifts up to 7.5% by printing ink of less than 4 μm thick. The resonant frequency scattering was reduced within 2%～0.5% using the tuning methods. Finally, three-dimensional object position measurement was successfully performed using the tuned array sensor. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ultrasonic sensors / three-dimensional measurement / phased array / resonant frequency / frequency tuning / PZT |
| Paper # | OME2003-41 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2003/6/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Ultrasonic Micro Array Sensors Using Piezoelectric Thin Films and Resonant Frequency Tuning |
| Sub Title (in English) | |
| Keyword(1) | ultrasonic sensors |
| Keyword(2) | three-dimensional measurement |
| Keyword(3) | phased array |
| Keyword(4) | resonant frequency |
| Keyword(5) | frequency tuning |
| Keyword(6) | PZT |
| 1st Author's Name | Kaoru YAMASHITA |
| 1st Author's Affiliation | Graduate School of Engineering Science, Osaka University() |
| 2nd Author's Name | Latpasamixay CHANSOMPHOU |
| 2nd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 3rd Author's Name | Hideyuki MURAKAMI |
| 3rd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 4th Author's Name | Masanori OKUYAMA |
| 4th Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| Date | 2003/6/27 |
| Paper # | OME2003-41 |
| Volume (vol) | vol.103 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |