Presentation 2003/6/27
An Investigation of Opto-Ultrasonic Combined Sensor
Makoto SHIROISHI, Satoru NOGE, Takehiko UNO,
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Abstract(in English) The authors had previously proposed a piezoelectric sensor configuration using an optical-access method, and reported an experimental result of frequency measurement using a Mach-Zehnder interferometer (MZI) composed of discrete optical elements. To improve the sensitivity and stability of the MZI circuit an integrated optical circuit must be developed. We have studied on a waveguide type optical circuit to detect resonance frequencies of resonators on a monolithic integrated quartz resonator array. Resonance frequencies were measured with high accuracy. Furthermore, we examined the effectiveness of the method for varying the light wavelength of semiconductor laser in order to obtain an optical path difference that brings the largest sensitivity.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Mach-Zehnder interferometer / Sensor / Optical circuit
Paper # OME2003-37
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Committee OME
Conference Date 2003/6/27(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) An Investigation of Opto-Ultrasonic Combined Sensor
Sub Title (in English)
Keyword(1) Mach-Zehnder interferometer
Keyword(2) Sensor
Keyword(3) Optical circuit
1st Author's Name Makoto SHIROISHI
1st Author's Affiliation Dept. of Electric and Electrical Engineering, Kanagawa Institute of Technology()
2nd Author's Name Satoru NOGE
2nd Author's Affiliation Dept. of Electric and Electrical Engineering, Kanagawa Institute of Technology
3rd Author's Name Takehiko UNO
3rd Author's Affiliation Dept. of Electric and Electrical Engineering, Kanagawa Institute of Technology
Date 2003/6/27
Paper # OME2003-37
Volume (vol) vol.103
Number (no) 170
Page pp.pp.-
#Pages 6
Date of Issue