Presentation 2003/1/17
2Dフォトニック結晶を用いた光導波路
Yukinori HIRANO,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Photonic crystal introduced by E. Yablonovitch, S. John etc. in 1987 is expected to be a new and important optical element. The crystal has a periodic refractive index distribution in one, two or three dimensional structure. For fabrication of 2D (two dimensional) photonic crystal, we used C-S-Au (Carbon-Sulfur-Gold) film with large refractive index (max 3.7) which can be etched by oxygen plasma easily. After we processed C-S-Au film by a lithography. The surface was made flat by spin coated polymer, such as PMMA.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Plasma Process / C-S-Au Film / Refractive Index / Photonic Crystal / Optical Waveguide
Paper # OME2002-100
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Committee OME
Conference Date 2003/1/17(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English)
Sub Title (in English)
Keyword(1) Plasma Process
Keyword(2) C-S-Au Film
Keyword(3) Refractive Index
Keyword(4) Photonic Crystal
Keyword(5) Optical Waveguide
1st Author's Name Yukinori HIRANO
1st Author's Affiliation Guraduate School of Engineering,Nagoya University()
Date 2003/1/17
Paper # OME2002-100
Volume (vol) vol.102
Number (no) 592
Page pp.pp.-
#Pages 6
Date of Issue