Presentation | 2003/1/17 2Dフォトニック結晶を用いた光導波路 Yukinori HIRANO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Photonic crystal introduced by E. Yablonovitch, S. John etc. in 1987 is expected to be a new and important optical element. The crystal has a periodic refractive index distribution in one, two or three dimensional structure. For fabrication of 2D (two dimensional) photonic crystal, we used C-S-Au (Carbon-Sulfur-Gold) film with large refractive index (max 3.7) which can be etched by oxygen plasma easily. After we processed C-S-Au film by a lithography. The surface was made flat by spin coated polymer, such as PMMA. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Plasma Process / C-S-Au Film / Refractive Index / Photonic Crystal / Optical Waveguide |
Paper # | OME2002-100 |
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Conference Information | |
Committee | OME |
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Conference Date | 2003/1/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Organic Material Electronics (OME) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | |
Sub Title (in English) | |
Keyword(1) | Plasma Process |
Keyword(2) | C-S-Au Film |
Keyword(3) | Refractive Index |
Keyword(4) | Photonic Crystal |
Keyword(5) | Optical Waveguide |
1st Author's Name | Yukinori HIRANO |
1st Author's Affiliation | Guraduate School of Engineering,Nagoya University() |
Date | 2003/1/17 |
Paper # | OME2002-100 |
Volume (vol) | vol.102 |
Number (no) | 592 |
Page | pp.pp.- |
#Pages | 6 |
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