| Presentation | 2003/1/17 MPF Optical Waveguide Fabrication Chikao Yamasaki, Shinzo Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Transparent microsphere array was observed to be useful for reduced curvature radius of thin-film optical waveguide. In this work, we tried to fabricate optical waveguide of pole array instead of microsphere array. By using polystyrene (negative tone resist), 3μm thick pole-array wave-guides were formed on Nesa-glass successfully by a conventional electron-beam lithography method For 5 and lOμmφ linear pole array, the light propagation was successfully realized. The propagation losses at a laser light wavelength of670nm were measured to be 0.30 dB/pole and 0.75 dB/pole for 5 and 10μmφ pole respectively. Close-up effect of electron-beam delineated pattern was observed and each pole wasn't separated In order to reduce close-up effect, new method to decrease the dose rate near the contact point of poles was adopted for the electron beam pattern delineation The curvilinear pole array for 1 0μmφ pole was fabricated successfully. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | optical waveguide / dielectric material / electron beam lithography / micro-pole array |
| Paper # | OME2002-99 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2003/1/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MPF Optical Waveguide Fabrication |
| Sub Title (in English) | |
| Keyword(1) | optical waveguide |
| Keyword(2) | dielectric material |
| Keyword(3) | electron beam lithography |
| Keyword(4) | micro-pole array |
| 1st Author's Name | Chikao Yamasaki |
| 1st Author's Affiliation | Graduate School of Engineering,Nagoya University() |
| 2nd Author's Name | Shinzo Morita |
| 2nd Author's Affiliation | Graduate School of Engineering,Nagoya University |
| Date | 2003/1/17 |
| Paper # | OME2002-99 |
| Volume (vol) | vol.102 |
| Number (no) | 592 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |