Presentation 2002/10/4
Precise center wavelength triming of vertically coupled microring resonator filter by direct UV irradiation to ring core
Hirofumi Haeiwa, Hiroaki Tanaka, Yasuo Kokubun,
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Abstract(in English) Vertically coupled microring resonator (VCMRR) filter is an attractive Add/Drop wavelength filter due to its functionallity, compactness, and the possibility of dense integration resulting from the cross-grid configuration. However, the accuracy of center wavelength was not satisfactorily enough for the DWDM systems. Thus, we developed a precise UV trimming of the center wavelength, which uses the direct UV irradiation to the Ta_2O_5-SiO_2 ring core. As a result, we achieved 0.48nm of center wavelength shift. The center wavelength shift was enhanced to 0.8nm, and the wavelength shift was stabilized for 2400 hours by hydrogen loading. In addition, we investigated the index change of the SiN film as a high Δ core material, and found a very large index change by UV exposure.
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Keyword(in English) wavelength filter / UV exposure / trimming / optical waveguide / ring resonator
Paper # OME2002-67
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Committee OME
Conference Date 2002/10/4(1days)
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Registration To Organic Material Electronics (OME)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Precise center wavelength triming of vertically coupled microring resonator filter by direct UV irradiation to ring core
Sub Title (in English)
Keyword(1) wavelength filter
Keyword(2) UV exposure
Keyword(3) trimming
Keyword(4) optical waveguide
Keyword(5) ring resonator
1st Author's Name Hirofumi Haeiwa
1st Author's Affiliation Yokohama National University, Graduate School of Engineering, Division of Physics, Electrical and Computer Engineering()
2nd Author's Name Hiroaki Tanaka
2nd Author's Affiliation Yokohama National University, Graduate School of Engineering, Division of Physics, Electrical and Computer Engineering
3rd Author's Name Yasuo Kokubun
3rd Author's Affiliation Yokohama National University, Faculty of Engineering, Division of Intelligent Systems Engineering
Date 2002/10/4
Paper # OME2002-67
Volume (vol) vol.102
Number (no) 368
Page pp.pp.-
#Pages 6
Date of Issue