Presentation | 2004/7/6 High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System Toshihiko NODA, Hidekuni TAKAO, Mitsuaki ASHIKI, Kazuaki SAWADA, Makoto ISHIDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In this study, a microchip for high resolution absorption photometry has been proposed, fabricated and evaluated. Glass/silicon/silicon structure was used for the microchip. The middle layer silicon includes flow channels, and 45° mirrors formed at each end of the flow channels. Photodiodes and MOS integrated circuits were fabricated on the bottom layer silicon. As a result of characterization, fabricated microchip has a similar performance to a non-miniaturized absorption cell which has the same optical path length. Signal processed output varied with solution concentration with very high stability thanks to differential signal processing. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | μ-TAS / Lab.-on-a-chip / chemical analysis / absorption photometry / 45° mirror / high resolution |
Paper # | ICD2004-39 |
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Conference Information | |
Committee | ICD |
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Conference Date | 2004/7/6(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System |
Sub Title (in English) | |
Keyword(1) | μ-TAS |
Keyword(2) | Lab.-on-a-chip |
Keyword(3) | chemical analysis |
Keyword(4) | absorption photometry |
Keyword(5) | 45° mirror |
Keyword(6) | high resolution |
1st Author's Name | Toshihiko NODA |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
2nd Author's Name | Hidekuni TAKAO |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
3rd Author's Name | Mitsuaki ASHIKI |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
4th Author's Name | Kazuaki SAWADA |
4th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
5th Author's Name | Makoto ISHIDA |
5th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
Date | 2004/7/6 |
Paper # | ICD2004-39 |
Volume (vol) | vol.104 |
Number (no) | 174 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |