| Presentation | 2004/7/6 High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System Toshihiko NODA, Hidekuni TAKAO, Mitsuaki ASHIKI, Kazuaki SAWADA, Makoto ISHIDA, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, a microchip for high resolution absorption photometry has been proposed, fabricated and evaluated. Glass/silicon/silicon structure was used for the microchip. The middle layer silicon includes flow channels, and 45° mirrors formed at each end of the flow channels. Photodiodes and MOS integrated circuits were fabricated on the bottom layer silicon. As a result of characterization, fabricated microchip has a similar performance to a non-miniaturized absorption cell which has the same optical path length. Signal processed output varied with solution concentration with very high stability thanks to differential signal processing. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | μ-TAS / Lab.-on-a-chip / chemical analysis / absorption photometry / 45° mirror / high resolution |
| Paper # | ICD2004-39 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
|---|---|
| Conference Date | 2004/7/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High Resolution Absorption Photometry Microchip Integrated with Silicon Photodetection System |
| Sub Title (in English) | |
| Keyword(1) | μ-TAS |
| Keyword(2) | Lab.-on-a-chip |
| Keyword(3) | chemical analysis |
| Keyword(4) | absorption photometry |
| Keyword(5) | 45° mirror |
| Keyword(6) | high resolution |
| 1st Author's Name | Toshihiko NODA |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Hidekuni TAKAO |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 3rd Author's Name | Mitsuaki ASHIKI |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 4th Author's Name | Kazuaki SAWADA |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 5th Author's Name | Makoto ISHIDA |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| Date | 2004/7/6 |
| Paper # | ICD2004-39 |
| Volume (vol) | vol.104 |
| Number (no) | 174 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |