Presentation	2003/1/23 Inner Logic Detection Technique of LSI with Laser Probing pad Masaru SANADA,
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Abstract(in English)	I have proposed LPP (Laser Probing Pad) to detect inner logic state by OBIC technique. The analysis technique using the LPP is a precise method that makes it easy to distinguish the logic state of advanced LSl with multi-metal layers and fine geometry layout. The LPP, being PN junction formed on silicon substrate(P-type), is connected to an arbitrary signal line. ELectron-hole pairs, generated by laser beam irradiated at LPP, are guided by line logic state and detected as photo-current. Experimental result denoted the photo-current with several dozen micron amperes by He-Ne laser (633nm at 1mW) irradiation at LPP with 2×2μm^2. The LPP brings under 0.01pF parasitic capacitance, being acceptable value.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	LSI / LPP (Laser Probing Pad) / Logic / Failure Analysis / OBIC (Optical Beam Induced Current
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Conference Information
Committee	ICD
Conference Date	2003/1/23(1days)
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Paper Information
Registration To	Integrated Circuits and Devices (ICD)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Inner Logic Detection Technique of LSI with Laser Probing pad
Sub Title (in English)
Keyword(1)	LSI
Keyword(2)	LPP (Laser Probing Pad)
Keyword(3)	Logic
Keyword(4)	Failure Analysis
Keyword(5)	OBIC (Optical Beam Induced Current
1st Author's Name	Masaru SANADA
1st Author's Affiliation	Manufacturing Operation Unit Analysis Technology Development Division NEC Electronics()
Date	2003/1/23
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Volume (vol)	vol.102
Number (no)	622
Page	pp.pp.-
#Pages	8
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