| Presentation | 2003/1/23 Development of Membrane Probe with Pyramidal Tips for LSI Testing Susumu KASUKABE, Terutaka MORI, Takayoshi WATANABE, Yasuhiro MOTOYAMA, Yuji WADA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A membrane probe with pyramidal tips is developed for bare chip and wafer testing to achieve good contact properties at small probing marks on LSIs with narrow pitch. By using anisotropic etching of silicon, quadrangular pyramidal pits are formed as the cast of probe tips. By nickel plating on these pits, pyramidal tips with copper wirings are formed on the polyimide film. Afterwards, the silicon wafer cast is dissolved by etching. This membrane probe shows stable contact resistance at 0.1-0.2 Q. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Probe / Test / LSI / Etching |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2003/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Membrane Probe with Pyramidal Tips for LSI Testing |
| Sub Title (in English) | |
| Keyword(1) | Probe |
| Keyword(2) | Test |
| Keyword(3) | LSI |
| Keyword(4) | Etching |
| 1st Author's Name | Susumu KASUKABE |
| 1st Author's Affiliation | Production Engineering Research Laboratory, Hitachi Ltd.() |
| 2nd Author's Name | Terutaka MORI |
| 2nd Author's Affiliation | Production Engineering Research Laboratory, Hitachi Ltd. |
| 3rd Author's Name | Takayoshi WATANABE |
| 3rd Author's Affiliation | Network Systems Solutions Division, Hitachi Ltd. |
| 4th Author's Name | Yasuhiro MOTOYAMA |
| 4th Author's Affiliation | Semiconductor & Integrated Circuits, Hitachi Ltd. |
| 5th Author's Name | Yuji WADA |
| 5th Author's Affiliation | Semiconductor & Integrated Circuits, Hitachi Ltd. |
| Date | 2003/1/23 |
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| Volume (vol) | vol.102 |
| Number (no) | 622 |
| Page | pp.pp.- |
| #Pages | 6 |
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