Presentation | 2003/1/23 A new analytical technique with four nano-probes to inspect electrical characteristics of a device on actual circuits Hiroshi YANAGITA, Takayuki MIZUNO, Fumiko YANO, Kaoru UMEMURA, Yasuhiro MITSUI, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed a new prober, "Nano-prober", which has four nano-probes and can inspect electrical characteristics of a device on actual circuits of LSI, e.g. a transistor and a contact via. This technique is very helpful to identify the exact location and the detailed origin of a failure. This report will show an outline of the "Nano-prober" and one examole of failure analysis by using it. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | prober / nano-probe / Nano-prober / electrical characteristics / failure analysis |
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Conference Information | |
Committee | ICD |
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Conference Date | 2003/1/23(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Registration To | Integrated Circuits and Devices (ICD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | A new analytical technique with four nano-probes to inspect electrical characteristics of a device on actual circuits |
Sub Title (in English) | |
Keyword(1) | prober |
Keyword(2) | nano-probe |
Keyword(3) | Nano-prober |
Keyword(4) | electrical characteristics |
Keyword(5) | failure analysis |
1st Author's Name | Hiroshi YANAGITA |
1st Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits() |
2nd Author's Name | Takayuki MIZUNO |
2nd Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits |
3rd Author's Name | Fumiko YANO |
3rd Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits |
4th Author's Name | Kaoru UMEMURA |
4th Author's Affiliation | Hitachi, Ltd., Central Research Laboratory |
5th Author's Name | Yasuhiro MITSUI |
5th Author's Affiliation | Hitachi High-Technologies Corporation |
Date | 2003/1/23 |
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Volume (vol) | vol.102 |
Number (no) | 622 |
Page | pp.pp.- |
#Pages | 2 |
Date of Issue |