| Presentation | 2003/1/23 A new analytical technique with four nano-probes to inspect electrical characteristics of a device on actual circuits Hiroshi YANAGITA, Takayuki MIZUNO, Fumiko YANO, Kaoru UMEMURA, Yasuhiro MITSUI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a new prober, "Nano-prober", which has four nano-probes and can inspect electrical characteristics of a device on actual circuits of LSI, e.g. a transistor and a contact via. This technique is very helpful to identify the exact location and the detailed origin of a failure. This report will show an outline of the "Nano-prober" and one examole of failure analysis by using it. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | prober / nano-probe / Nano-prober / electrical characteristics / failure analysis |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2003/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A new analytical technique with four nano-probes to inspect electrical characteristics of a device on actual circuits |
| Sub Title (in English) | |
| Keyword(1) | prober |
| Keyword(2) | nano-probe |
| Keyword(3) | Nano-prober |
| Keyword(4) | electrical characteristics |
| Keyword(5) | failure analysis |
| 1st Author's Name | Hiroshi YANAGITA |
| 1st Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits() |
| 2nd Author's Name | Takayuki MIZUNO |
| 2nd Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits |
| 3rd Author's Name | Fumiko YANO |
| 3rd Author's Affiliation | Hitachi, Ltd., Semiconductor & Integrated Circuits |
| 4th Author's Name | Kaoru UMEMURA |
| 4th Author's Affiliation | Hitachi, Ltd., Central Research Laboratory |
| 5th Author's Name | Yasuhiro MITSUI |
| 5th Author's Affiliation | Hitachi High-Technologies Corporation |
| Date | 2003/1/23 |
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| Volume (vol) | vol.102 |
| Number (no) | 622 |
| Page | pp.pp.- |
| #Pages | 2 |
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