| Presentation | 2004/1/23 Fabrication of InP-based Two Dimensional Photonic Crystal Structures by Using Selective Area MOVPE Masaru INARI, Junichiro TAKEDA, Junichi MOTOHISA, Takashi FUKUI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Photonic crystals (PCs) have received much attention as a new class of optical materials. PCs are modulated dielectric structures whose period is near the light wavelength, enabling us to control spontaneous emission and propagation of lightwaves using photonic band gaps. In particular, high aspect ratio, smooth surface, and high uniformity are required to achieve two-dimensional PCs (2DPCs). In this paper, we report on the fabrication of InP pillar structures on InP substrates by using selective area metal organic vapor phase epitaxy (SA-MOVPE) for application to InP-based 2DPCs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOVPE / InP / (111)A / (111)B / Two dimensional Photonic Crystals |
| Paper # | SDM2003-221 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2004/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of InP-based Two Dimensional Photonic Crystal Structures by Using Selective Area MOVPE |
| Sub Title (in English) | |
| Keyword(1) | MOVPE |
| Keyword(2) | InP |
| Keyword(3) | (111)A |
| Keyword(4) | (111)B |
| Keyword(5) | Two dimensional Photonic Crystals |
| 1st Author's Name | Masaru INARI |
| 1st Author's Affiliation | Research Center for Integrated Quantum Electronics, Hokkaido University() |
| 2nd Author's Name | Junichiro TAKEDA |
| 2nd Author's Affiliation | Research Center for Integrated Quantum Electronics, Hokkaido University |
| 3rd Author's Name | Junichi MOTOHISA |
| 3rd Author's Affiliation | Research Center for Integrated Quantum Electronics, Hokkaido University |
| 4th Author's Name | Takashi FUKUI |
| 4th Author's Affiliation | Research Center for Integrated Quantum Electronics, Hokkaido University |
| Date | 2004/1/23 |
| Paper # | SDM2003-221 |
| Volume (vol) | vol.103 |
| Number (no) | 631 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |