| Presentation | 2003/4/8 Orientation Control of Poly(di-methyl silane) Thin Film Prepared By Vacuum Evaporation Method Hidetaka OHTA, Shoji FURUKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Poly(di-methyl silane) thin films have been prepared by vacuum evaporation technique. In the previous study, it was found that the oriented film can be obtained on Si(100) wafer substrate at high substrate temperature. Moreover, the molecular orientation can be controlled by changing evaporation pressure. The temperature of the substrate was held constant at 100℃. In this paper, we have prepared the oriented film on the Si(100) substrate as well as the quartz glass substrate. We also investigated the effect of the distance between the substrate and the source on the structure of the film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Organopolysilane / Poly(di-methyl silane) / Vacuum Evaporation Method / Orientation Control |
| Paper # | ED2003-10,SDM2003-10,OME2003-10 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2003/4/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Orientation Control of Poly(di-methyl silane) Thin Film Prepared By Vacuum Evaporation Method |
| Sub Title (in English) | |
| Keyword(1) | Organopolysilane |
| Keyword(2) | Poly(di-methyl silane) |
| Keyword(3) | Vacuum Evaporation Method |
| Keyword(4) | Orientation Control |
| 1st Author's Name | Hidetaka OHTA |
| 1st Author's Affiliation | Graduate School of Computer Science and Systems Engineering, Kyushu Institute of Technology:CREST Japan Science and Technology Corporation() |
| 2nd Author's Name | Shoji FURUKAWA |
| 2nd Author's Affiliation | Graduate School of Computer Science and Systems Engineering, Kyushu Institute of Technology:CREST Japan Science and Technology Corporation |
| Date | 2003/4/8 |
| Paper # | ED2003-10,SDM2003-10,OME2003-10 |
| Volume (vol) | vol.103 |
| Number (no) | 6 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |