| Presentation | 2004/1/9 Low Noise Balanced-CMOS Technology Formed on Si(110) Surface Akinobu TERAMOTO, Tatsufumi HAMADA, Hiroshi AKAHORI, Keiichi NII, Koji KOTANI, Tadahiro OHMI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper demonstrated the CMOS characteristics on Si(110) surface by using surface flattening process and radical oxidation. By forming a MOS device on Si(110) surface, the high-speed and low 1/f noise p-MOSFET can be realized. Furthermore, the current drivability of p-MOS and n-MOS has balanced in the CMOS (balanced CMOS) on Si(110) surface can be also realized. These are very useful to the analog/digital mixed signal circuits. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon / Orientation / mobility / micro-roughness / Balanced-CMOS / noise |
| Paper # | SDM2003-205 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2004/1/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Noise Balanced-CMOS Technology Formed on Si(110) Surface |
| Sub Title (in English) | |
| Keyword(1) | Silicon |
| Keyword(2) | Orientation |
| Keyword(3) | mobility |
| Keyword(4) | micro-roughness |
| Keyword(5) | Balanced-CMOS |
| Keyword(6) | noise |
| 1st Author's Name | Akinobu TERAMOTO |
| 1st Author's Affiliation | New Industry Hatchery Center, Tohoku University() |
| 2nd Author's Name | Tatsufumi HAMADA |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Hiroshi AKAHORI |
| 3rd Author's Affiliation | New Industry Hatchery Center, Tohoku University:Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Keiichi NII |
| 4th Author's Affiliation | New Industry Hatchery Center, Tohoku University |
| 5th Author's Name | Koji KOTANI |
| 5th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 6th Author's Name | Tadahiro OHMI |
| 6th Author's Affiliation | New Industry Hatchery Center, Tohoku University |
| Date | 2004/1/9 |
| Paper # | SDM2003-205 |
| Volume (vol) | vol.103 |
| Number (no) | 556 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |