| Presentation | 2003/12/12 Observation of SiGe/Si micro-origami structure fabricated on SOI substrate Yoshihisa SAKANO, Daisuke MORI, Takashi TOKUDA, Jun Ohta, Masahiro NUNOSHITA, Kazuyoshi KUBOTA, Pablo O. Vaccaro, Syuichi TAMURA, Hailong Wang, Nobuo SAITO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A "micro-origami" structure was fabricated with SiGe/Si heteroepitaxial layers grown on a SOI substrate. As a sacrificial layer in the micro-origami process, the BOX layer of a SOI substrate was etched in the process. The fabrication of microtubes, and a hinge & plate structure were successfully demonstrated. The strain in the epitaxial structures in micro-origami was characterized by a laser raman spectroscopy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI substrate / MEMS / SiGe/Si / Micro-origami / Laser raman Spectroscopy / drive |
| Paper # | SDM2003-188(2003-12) |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2003/12/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Observation of SiGe/Si micro-origami structure fabricated on SOI substrate |
| Sub Title (in English) | |
| Keyword(1) | SOI substrate |
| Keyword(2) | MEMS |
| Keyword(3) | SiGe/Si |
| Keyword(4) | Micro-origami |
| Keyword(5) | Laser raman Spectroscopy |
| Keyword(6) | drive |
| 1st Author's Name | Yoshihisa SAKANO |
| 1st Author's Affiliation | NARA INSTITUTE of SCIENCE and TECHNOLOGY() |
| 2nd Author's Name | Daisuke MORI |
| 2nd Author's Affiliation | NARA INSTITUTE of SCIENCE and TECHNOLOGY |
| 3rd Author's Name | Takashi TOKUDA |
| 3rd Author's Affiliation | NARA INSTITUTE of SCIENCE and TECHNOLOGY |
| 4th Author's Name | Jun Ohta |
| 4th Author's Affiliation | NARA INSTITUTE of SCIENCE and TECHNOLOGY |
| 5th Author's Name | Masahiro NUNOSHITA |
| 5th Author's Affiliation | NARA INSTITUTE of SCIENCE and TECHNOLOGY |
| 6th Author's Name | Kazuyoshi KUBOTA |
| 6th Author's Affiliation | ATR Adaptive Communications Research Laboratories |
| 7th Author's Name | Pablo O. Vaccaro |
| 7th Author's Affiliation | ATR Adaptive Communications Research Laboratories |
| 8th Author's Name | Syuichi TAMURA |
| 8th Author's Affiliation | ATR Adaptive Communications Research Laboratories |
| 9th Author's Name | Hailong Wang |
| 9th Author's Affiliation | ATR Adaptive Communications Research Laboratories |
| 10th Author's Name | Nobuo SAITO |
| 10th Author's Affiliation | ATR Adaptive Communications Research Laboratories |
| Date | 2003/12/12 |
| Paper # | SDM2003-188(2003-12) |
| Volume (vol) | vol.103 |
| Number (no) | 533 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |