Presentation 2003/8/15
The Umbrella Cell : A Logic-Process-Compatible 2T Cell for SOC Applications
Satoru AKIYAMA, Nobuhiro OODAIRA, Tsuyoshi ISHIKAWA, Digh HISAMOTO, Takao WATANABE,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We propose the Umbrella Cell, a logic-process-compatible 2T-DRAM cell for SOC applications. The cell has two logic transistors and a planar MIM capacitor placed on a Cu wire above the transistors to form an umbrella-like structure. This requires one additional photo mask. Its area is 26 F^2, approximately 60% smaller than a 6T cell. Careful bias design and a dual-precharge scheme solve the coupling problems inherent to the cell and allow the use of thin-oxide logic transistors as well as operation at a bit-line voltage of 0.72 V.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SOC / Memory cell / Umbrella Cell / Metal-Insulator-Metal Capacitor / Retention time / Dual Precharge Scheme
Paper # SDM2003-138,ICD2003-71
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Committee SDM
Conference Date 2003/8/15(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The Umbrella Cell : A Logic-Process-Compatible 2T Cell for SOC Applications
Sub Title (in English)
Keyword(1) SOC
Keyword(2) Memory cell
Keyword(3) Umbrella Cell
Keyword(4) Metal-Insulator-Metal Capacitor
Keyword(5) Retention time
Keyword(6) Dual Precharge Scheme
1st Author's Name Satoru AKIYAMA
1st Author's Affiliation Central Research Laboratory, Hitachi, Ltd.()
2nd Author's Name Nobuhiro OODAIRA
2nd Author's Affiliation Hitachi ULSI Systems Co., Ltd.
3rd Author's Name Tsuyoshi ISHIKAWA
3rd Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
4th Author's Name Digh HISAMOTO
4th Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
5th Author's Name Takao WATANABE
5th Author's Affiliation Central Research Laboratory, Hitachi, Ltd.
Date 2003/8/15
Paper # SDM2003-138,ICD2003-71
Volume (vol) vol.103
Number (no) 260
Page pp.pp.-
#Pages 6
Date of Issue