Presentation 2003/8/15
Memory cell for Embeded DRAM on SOI : FBC(Floating Body Cell)
Yoshihiro MINAMI, Kazumi INOH, Tomoaki SHINO, Hiroaki YAMADA, Hiroomi NAKAJIMA, Takashi YAMADA, Takashi OHSAWA, Tomoki HIGASHI, Katsuyuki FUJITA, Tamio IKEHASHI, Takeshi KAJIYAMA, Yoshiaki FUKUZUMI, Takeshi HAMAMOTO, Hidemi ISHIUCHI,
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Abstract(in English) The memory cell characteristics of the FBC (Floating Body Cell) have been experimentally verified by 0.175 μm cell array for the first time. The FBC is a one-transistor gain cell, which is a suitable structure for the future embedded DRAM on SOI wafer. 99.77% function bit yield of 96Kbit ADM(Array Diagnostic Monitor) has been obtained, and the retention time of 500msec have been realized at 85℃.
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Paper # SDM2003-136,ICD2003-69
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Committee SDM
Conference Date 2003/8/15(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Memory cell for Embeded DRAM on SOI : FBC(Floating Body Cell)
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1st Author's Name Yoshihiro MINAMI
1st Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company()
2nd Author's Name Kazumi INOH
2nd Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
3rd Author's Name Tomoaki SHINO
3rd Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
4th Author's Name Hiroaki YAMADA
4th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
5th Author's Name Hiroomi NAKAJIMA
5th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
6th Author's Name Takashi YAMADA
6th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
7th Author's Name Takashi OHSAWA
7th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
8th Author's Name Tomoki HIGASHI
8th Author's Affiliation Design Solution Division,Toshiba Microelectronics Corp.
9th Author's Name Katsuyuki FUJITA
9th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
10th Author's Name Tamio IKEHASHI
10th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
11th Author's Name Takeshi KAJIYAMA
11th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
12th Author's Name Yoshiaki FUKUZUMI
12th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
13th Author's Name Takeshi HAMAMOTO
13th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
14th Author's Name Hidemi ISHIUCHI
14th Author's Affiliation SoC Research and Development Center, Toshiba Corp. Semiconductor Company
Date 2003/8/15
Paper # SDM2003-136,ICD2003-69
Volume (vol) vol.103
Number (no) 260
Page pp.pp.-
#Pages 4
Date of Issue