Presentation 2003/6/25
Effects of thermal annealing on optical and structural properties of 1.3μm digital-alloy InGaAlAs MQW(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
J. D. SONG, J. M. KIM, S. J. BAE, Y. T. LEE, P. OFFERMANS, P. KOENRAAD, J. WOLTER,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Effect of rapid thermal annealing on optical and structural properties of 1.3μm digital-alloy InGaAlAs MQW structure was studied with 300 K-PL, transmission electron microscopy, and scanning tunneling microscopy. 300K-PL peak intensity increases abruptly above the annealing temperature (T_) of 625℃. Above T_> 800℃, 300K-PL spectrum shows decease of PL intensity and slight blue-shift. The curing and degradation process of digital-alloy MQWs are investigated in the view of congruent sublimation temperature.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InGaAlAs / Digital-alloy / MBE / Thermal annealing / Curing / Lateral composition modulation
Paper # ED2003-95,SDM2003-106
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Committee SDM
Conference Date 2003/6/25(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effects of thermal annealing on optical and structural properties of 1.3μm digital-alloy InGaAlAs MQW(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
Sub Title (in English)
Keyword(1) InGaAlAs
Keyword(2) Digital-alloy
Keyword(3) MBE
Keyword(4) Thermal annealing
Keyword(5) Curing
Keyword(6) Lateral composition modulation
1st Author's Name J. D. SONG
1st Author's Affiliation Nano-device Research Center, Korea Institute of Science and Technology()
2nd Author's Name J. M. KIM
2nd Author's Affiliation Department of Information and Communications, Kwangju Institute of Science and Technology
3rd Author's Name S. J. BAE
3rd Author's Affiliation Department of Information and Communications, Kwangju Institute of Science and Technology
4th Author's Name Y. T. LEE
4th Author's Affiliation Department of Information and Communications, Kwangju Institute of Science and Technology
5th Author's Name P. OFFERMANS
5th Author's Affiliation Department of Semiconductor Physics, Eindhoven University of Technology
6th Author's Name P. KOENRAAD
6th Author's Affiliation Department of Semiconductor Physics, Eindhoven University of Technology
7th Author's Name J. WOLTER
7th Author's Affiliation Department of Semiconductor Physics, Eindhoven University of Technology
Date 2003/6/25
Paper # ED2003-95,SDM2003-106
Volume (vol) vol.103
Number (no) 164
Page pp.pp.-
#Pages 4
Date of Issue