| Presentation | 2003/3/11 Physical Properties of Bismuth Titanate Thin Films by Alternately Supplying MOD Method Masaki Yamaguchi, Yoichiro Masuda, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Bismuth titanate (Bi_4Ti_3O_<12>) thin films were formed on (100)-oriented silicon wafers derived by alternately supplying metal organic decomposition (MOD) method In the conventional MOD method, it is necessary to carry out the high temperature processes. In contrast, the element was artificially made before the crystallized process by the alternately supplying method. From the experimental result, it was clarified that the alternately supplying method is possible to lower the crystallized temperature of a thin film fabrication. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Bismuth titanate / alternately supplying method / metal-organic decomposition method / bismuth silicate / thin films |
| Paper # | SDM2002-273 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2003/3/11(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Physical Properties of Bismuth Titanate Thin Films by Alternately Supplying MOD Method |
| Sub Title (in English) | |
| Keyword(1) | Bismuth titanate |
| Keyword(2) | alternately supplying method |
| Keyword(3) | metal-organic decomposition method |
| Keyword(4) | bismuth silicate |
| Keyword(5) | thin films |
| 1st Author's Name | Masaki Yamaguchi |
| 1st Author's Affiliation | Department of Electrical Engineering, Shibaura Institute of Technology:Research Organization for Advanced Engineering, Shibaura Institute of Technology:Research Organization for Advanced Engineering, Shibaura Institute of Technology:Research Organization for Advanced Engineering, Shibaura Institute of Technology:Research Organization for Advanced Engineering, Shibaura Institute of Technology() |
| 2nd Author's Name | Yoichiro Masuda |
| 2nd Author's Affiliation | Department of Electrical Engineering, Hachinohe Institute of Technology |
| Date | 2003/3/11 |
| Paper # | SDM2002-273 |
| Volume (vol) | vol.102 |
| Number (no) | 732 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |