Presentation 2002/11/8
Study of ESD Examination Method for Charged Device Model
Munehiko MIGUCHI, Yoshiharu KATAOKA, Shinji NAKANO, Tetsuaki WADA,
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Abstract(in English) The ESD testing method of the semiconductor device is classified broadly into Human Body Model (Machine Model as alternative test) and Charged Device Model. Regarding Charged Device Model, the discharge method using a mercury relay is standardized in Japan as JEITA standard. On the other hand, the aerial discharge method using a discharge plate is standardized in U.S. as JEDEC standard. Generally, charging voltage represents the ESD immunity for the Charged Device Model. In this paper, we clarified that ESD failure was strongly depended on the peak current (Ip) value of discharge waveform, not discharge method or charging voltage. And we indicated the future direction of standardization by applying this result.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ESD / CDM / FICDM
Paper # R2002-37
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Committee R
Conference Date 2002/11/8(1days)
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Registration To Reliability(R)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Study of ESD Examination Method for Charged Device Model
Sub Title (in English)
Keyword(1) ESD
Keyword(2) CDM
Keyword(3) FICDM
1st Author's Name Munehiko MIGUCHI
1st Author's Affiliation Matsushita Electronics Industry Semiconductor Corporation Quality Laboratory()
2nd Author's Name Yoshiharu KATAOKA
2nd Author's Affiliation Matsushita Electronics Industry Semiconductor Corporation Quality Laboratory
3rd Author's Name Shinji NAKANO
3rd Author's Affiliation Matsushita Electronics Industry Semiconductor Corporation Quality Laboratory
4th Author's Name Tetsuaki WADA
4th Author's Affiliation Matsushita Electronics Industry Semiconductor Corporation Quality Laboratory
Date 2002/11/8
Paper # R2002-37
Volume (vol) vol.102
Number (no) 454
Page pp.pp.-
#Pages 6
Date of Issue