| Presentation | 2004/5/7 A Compact Helical Delay Line Tamotsu Nishino, Moriyasu Miyazaki, Sang-seok Lee, Yukihisa Yoshida, Tadashi Takagi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Small size quasi-lumped-element helical delay lines are presented. The device is disposed in a dielectric-air-metal (DAM) cavity, which consists of a SiNx membrane above a hollow cavity made by silicon micromachining process. The delay line is composed of fine segments of a one-turn inductor and a tiny shunt. The fineness of the segments realizes linear frequency responses up to more than 40GHz, and the optimal LC values of the segment drastically reduce the wavelength. The compact delay line is useful to reduce the size of microwave components such as phase shifters or feedback amplifiers. The 7-turn, 12-turn and 17-turn helical delay lines were fabricated. The 12-turn delay line showed 450°-delay for 1050μm-long line with 2.5-dB loss at 30 GHz.. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Micromachining / Delay Line / Helical / MEMS |
| Paper # | MW2004-26 |
| Date of Issue |
| Conference Information | |
| Committee | MW |
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| Conference Date | 2004/5/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Compact Helical Delay Line |
| Sub Title (in English) | |
| Keyword(1) | Micromachining |
| Keyword(2) | Delay Line |
| Keyword(3) | Helical |
| Keyword(4) | MEMS |
| 1st Author's Name | Tamotsu Nishino |
| 1st Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center() |
| 2nd Author's Name | Moriyasu Miyazaki |
| 2nd Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 3rd Author's Name | Sang-seok Lee |
| 3rd Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 4th Author's Name | Yukihisa Yoshida |
| 4th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 5th Author's Name | Tadashi Takagi |
| 5th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| Date | 2004/5/7 |
| Paper # | MW2004-26 |
| Volume (vol) | vol.104 |
| Number (no) | 46 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |