Presentation 2002/5/15
A 13.56MHz Band Loosely-Coupled Microstrip Directional Coupler
Takahiro HIRASHIMA, Ryoichi FUJII, Shuitsu FUJII, Satoshi TANAKA,
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Abstract(in English) A directional coupler using the microstrip lines for large RF power measurement applications such as the plasma processing is proposed. This coupler consists only of a planer edge coupled microstrip line, which is about 1/300 long of wavelength in coupled section at 13.56MHz. The transmission model analysis is employed for analyzing and designing of this coupler and shows stable operation can be performed in the varying of the load impedance. The lumped circuit equivalent model is also proposed for a convenient analysis. Experimental results of the coupler are 20dB of directivity and the 50dB of coupling factor at the design frequency. These are good agree with the theoretical results.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Directional Coupler / Loosely-Coupled / Edge Coupled / Microstrip Line / RF Band
Paper # MW2002-31
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Committee MW
Conference Date 2002/5/15(1days)
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Registration To Microwaves (MW)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A 13.56MHz Band Loosely-Coupled Microstrip Directional Coupler
Sub Title (in English)
Keyword(1) Directional Coupler
Keyword(2) Loosely-Coupled
Keyword(3) Edge Coupled
Keyword(4) Microstrip Line
Keyword(5) RF Band
1st Author's Name Takahiro HIRASHIMA
1st Author's Affiliation Chugoku Polytechnic College()
2nd Author's Name Ryoichi FUJII
2nd Author's Affiliation Fukuyama Polytechnic College
3rd Author's Name Shuitsu FUJII
3rd Author's Affiliation ADTEC Plasma Technology Co.,Ltd.
4th Author's Name Satoshi TANAKA
4th Author's Affiliation Faculty of Engineering, Fukuyama University
Date 2002/5/15
Paper # MW2002-31
Volume (vol) vol.102
Number (no) 70
Page pp.pp.-
#Pages 6
Date of Issue