Presentation | 2003/6/5 Study of Nanocrystalline Soft Magnetic Material of an Fe-Si-Al-N Film with High Saturation Magnetization and Low SUL Noise Shin SAITO, Atsushi HASHIMOTO, Kenichi HIRAI, Migaku TAKAHASHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | To develop nanocrystalline soft magnetic underlayer (SUL) material with high saturation magnetization and low SUL noise, we studied the properties of an Fe-Si-Al-N film. To obtain SUL with high stray-field stability, the Fe-Si-Al-N film is applied to antiferro/ferromagnetic (AFM/FM) multilayer films. As the results, the following points are clarified: 1) As the composition of FeSiAlN film, with increasing nitrogen flow ratio, Fe is replace with N on constant Al + Si concentration line. 2) With increasing nitrogen content, soft magnetic properties of FeSiAlN film are increased due to nanocrystalline effect. 3) As the grain size of FeSiAlN film is decreased, the SUL noise of FeSiAlN film is reduced. Since subsequent high temperature annealing process is not necessary, this process is promising to be applied for moderate temperature process. 4) In the AFM/FM stacked SUL film, the unidirectionOal exchange energy J_k is decreased with the total magnetization of the film. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | FeSiAlN / soft underlayer / moderate temperature process / nanocrystalline effect / antiferro-ferromagnetic coupling |
Paper # | MR2003-2 |
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Conference Information | |
Committee | MR |
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Conference Date | 2003/6/5(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Magnetic Recording (MR) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Study of Nanocrystalline Soft Magnetic Material of an Fe-Si-Al-N Film with High Saturation Magnetization and Low SUL Noise |
Sub Title (in English) | |
Keyword(1) | FeSiAlN |
Keyword(2) | soft underlayer |
Keyword(3) | moderate temperature process |
Keyword(4) | nanocrystalline effect |
Keyword(5) | antiferro-ferromagnetic coupling |
1st Author's Name | Shin SAITO |
1st Author's Affiliation | Department of Electronic Engineering, Graduate School of Engineering, Tohoku University() |
2nd Author's Name | Atsushi HASHIMOTO |
2nd Author's Affiliation | Department of Electronic Engineering, Graduate School of Engineering, Tohoku University |
3rd Author's Name | Kenichi HIRAI |
3rd Author's Affiliation | Department of Electronic Engineering, Graduate School of Engineering, Tohoku University |
4th Author's Name | Migaku TAKAHASHI |
4th Author's Affiliation | New Industry Creation Hatchery Center, Tohoku University |
Date | 2003/6/5 |
Paper # | MR2003-2 |
Volume (vol) | vol.103 |
Number (no) | 109 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |