| Presentation | 2003/6/5 Fabrication of magnetic nanodot arrays by using electroless deposition process Jun KAWAJI, Futoshi KITAIZUMI, Takayuki HOMMA, Tetsuya OSAKA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CoNiP magnetic nanodot arrays were fabricated by using electroless deposition process. A patterned Si substrate with SiO_2 resist was prepared in combination with electron beam lithography and reactive ion etching. By immersing the patterned Si substrate which was cleaned and pretreated into CoNiP electroless deposition bath, the CoNiP was deposited onto the Si patterned dot without the deposition on SiO_2 resist, exhibiting the sufficient selectivity of CoNiP deposition. Moreover, the CoNiP dot arrays with small diameter of 100 nm and high aspect ratio of 5 could be fabricated by activating the surface of Si patterned substrate. The CoNiP dot arrays exhibited the higher perpendicular squareness ratio than the CoNiP continuous film and they showed the clear magnetization state at de-magnetization state, which were thought to be due to the enhancement of shape anisotropy in the perpendicular direction with increase in the aspect ratio of the dots. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Magnetic nanodot arrays / electroless deposition / CONiP alloy / patterned Si substrate / deposition selectivity / shape anisotropy |
| Paper # | MR2003-1 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2003/6/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of magnetic nanodot arrays by using electroless deposition process |
| Sub Title (in English) | |
| Keyword(1) | Magnetic nanodot arrays |
| Keyword(2) | electroless deposition |
| Keyword(3) | CONiP alloy |
| Keyword(4) | patterned Si substrate |
| Keyword(5) | deposition selectivity |
| Keyword(6) | shape anisotropy |
| 1st Author's Name | Jun KAWAJI |
| 1st Author's Affiliation | School of Science & Engineering, Waseda University() |
| 2nd Author's Name | Futoshi KITAIZUMI |
| 2nd Author's Affiliation | School of Science & Engineering, Waseda University |
| 3rd Author's Name | Takayuki HOMMA |
| 3rd Author's Affiliation | School of Science & Engineering, Waseda University |
| 4th Author's Name | Tetsuya OSAKA |
| 4th Author's Affiliation | School of Science & Engineering, Waseda University |
| Date | 2003/6/5 |
| Paper # | MR2003-1 |
| Volume (vol) | vol.103 |
| Number (no) | 109 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |