| Presentation | 2002/10/31 Low Temperature Sputter-Deposition of Ni-Zn Ferrite Thin-Films Using Electron-Cyclotron-Resonance Microwave Plasma : Soft Magnetic Backlayer for Spinel Ferrite Thin-Film Perpendicular Magnetic Recording Media Hirofumi WADA, Setsuo YAMAMOTO, Hiroki KURISU, Mitsuru MATSUURA, Yoshihiro SHIMOSATO, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel reactive sputtering method using an Electron-Cyclotron-Resonance (ECR) microwave plasma was used to deposit Ni-Zn ferrite thin-films for a soft magnetic backlayer of Co-containing spinel ferrite thin-film perpendicular magnetic recording media. To achieve high deposition rate, configuration of sputtering target, position of oxygen gas inlet and processing parameters such as microwave input power, target voltage, oxygen partial pressure were carefully optimized. Ni-Zn spinel ferrite thin-films with preferential orientation of (400) and relatively low coercivity of 15 Oe were obtained at a high deposition rate of 14 nm/min and at a temperatures lower than 200 degrees C. The reactive ECR sputtering is one of the most suitable preparation methods of ferrite thin-films applicable to the perpendicular magnetic recording media. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ni-Zn ferrite thin-films / Reactive ECR sputtering / Perpendicular recording / Recording media |
| Paper # | MR 2002-38 |
| Date of Issue |
| Conference Information | |
| Committee | MR |
|---|---|
| Conference Date | 2002/10/31(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Magnetic Recording (MR) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Temperature Sputter-Deposition of Ni-Zn Ferrite Thin-Films Using Electron-Cyclotron-Resonance Microwave Plasma : Soft Magnetic Backlayer for Spinel Ferrite Thin-Film Perpendicular Magnetic Recording Media |
| Sub Title (in English) | |
| Keyword(1) | Ni-Zn ferrite thin-films |
| Keyword(2) | Reactive ECR sputtering |
| Keyword(3) | Perpendicular recording |
| Keyword(4) | Recording media |
| 1st Author's Name | Hirofumi WADA |
| 1st Author's Affiliation | Faculty of Engineering, Yamaguchi University() |
| 2nd Author's Name | Setsuo YAMAMOTO |
| 2nd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 3rd Author's Name | Hiroki KURISU |
| 3rd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 4th Author's Name | Mitsuru MATSUURA |
| 4th Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 5th Author's Name | Yoshihiro SHIMOSATO |
| 5th Author's Affiliation | SHIMADZU Corporation |
| Date | 2002/10/31 |
| Paper # | MR 2002-38 |
| Volume (vol) | vol.102 |
| Number (no) | 423 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |