Presentation | 2004/4/9 Impact of Grain Boundaries on Device Characteristics and Reliability in Low-Temperature Poly-Si Thin Film Transistors Toshiaki Tsuchiya, Nobuo Sasaki, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Field effect mobility and subthreshold slope dependences on temperature, and threshold voltage dependences on drain voltage in low-temperature poly-Si TFTs are shown, and the influence of the grain boundaries on the TFT device characteristics and floating body effects are discussed. Hot-carrier-induced device degradation mechanism and the impact of the grain boundaries on the hot carrier reliability in the TFTs are also discussed. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | TFT / grain boundary / hot carrier reliability / field effect mobility / subthreshold slope / floating body effects |
Paper # | ED2004-10,SDM2004-10,OME2004-10 |
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Conference Information | |
Committee | ED |
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Conference Date | 2004/4/9(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Impact of Grain Boundaries on Device Characteristics and Reliability in Low-Temperature Poly-Si Thin Film Transistors |
Sub Title (in English) | |
Keyword(1) | TFT |
Keyword(2) | grain boundary |
Keyword(3) | hot carrier reliability |
Keyword(4) | field effect mobility |
Keyword(5) | subthreshold slope |
Keyword(6) | floating body effects |
1st Author's Name | Toshiaki Tsuchiya |
1st Author's Affiliation | Interdisciplinary Faculty of Science and Engineering, Shimane University() |
2nd Author's Name | Nobuo Sasaki |
2nd Author's Affiliation | Silicon Technology Labs, Fujitsu Laboratories Ltd. |
Date | 2004/4/9 |
Paper # | ED2004-10,SDM2004-10,OME2004-10 |
Volume (vol) | vol.104 |
Number (no) | 3 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |