| Presentation | 2004/6/4 Monolithic integration of UTC-PDs and HBTs using Be ion implantation Norihide KASHIO, Shoji YAMAHATA, Minoru IDA, Kenji KURISHIMA, Takatomo ENOKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Uni-traveling-carrier photodiodes (UTC-PDs) and InP heterojunction bipolar transistor (HBTs) have been monolithically integrated using Be ion implantation. UTC-PDs have been fabricated from the InP HBT layer structure using Be ion implantation and rapid thermal annealing (RTA). The UTC-PD exhibits good I-V characteristics. The ideality factor is 1.3 and the breakdown voltage is over 7 V. The 3-dB bandwidth is estimated to be over 40 GHz with a lightwave component analyzer. The fabricated HBT exhibits a β of 25, an f_t of 150 GHz, and an f_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Be ion implantatoin / InP / HBT / OEIC |
| Paper # | ED2004-39 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2004/6/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Monolithic integration of UTC-PDs and HBTs using Be ion implantation |
| Sub Title (in English) | |
| Keyword(1) | Be ion implantatoin |
| Keyword(2) | InP |
| Keyword(3) | HBT |
| Keyword(4) | OEIC |
| 1st Author's Name | Norihide KASHIO |
| 1st Author's Affiliation | NTT Photonics Laboratories, Nippon Telegraph and Telephone Corporation() |
| 2nd Author's Name | Shoji YAMAHATA |
| 2nd Author's Affiliation | NTT Photonics Laboratories, Nippon Telegraph and Telephone Corporation:(Present address)Advanced Telecommunication Research Institute international |
| 3rd Author's Name | Minoru IDA |
| 3rd Author's Affiliation | NTT Photonics Laboratories, Nippon Telegraph and Telephone Corporation |
| 4th Author's Name | Kenji KURISHIMA |
| 4th Author's Affiliation | NTT Photonics Laboratories, Nippon Telegraph and Telephone Corporation |
| 5th Author's Name | Takatomo ENOKI |
| 5th Author's Affiliation | NTT Photonics Laboratories, Nippon Telegraph and Telephone Corporation |
| Date | 2004/6/4 |
| Paper # | ED2004-39 |
| Volume (vol) | vol.104 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |