| Presentation | 2004/6/4 N-channel Enhancement : Inversion Mode GaAs-MISFETs with Gate Insulating Layers Formed by Dry Oxi-Nitridation Mitoko TAMETOU, Masahide TAKEBE, Narayan Chandra Paul, Kouichi IIYAMA, Saburo TAKAMIYA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated n-channel enhancement/inversion mode GaAs-MISFETs with 14nm thickness gate insulator, which is formed by oxidation and nitridation of GaAs surface. They have sharper pinch-off than GaAs-MOSFE. Hysteresis is hardly observed. They showed transconductances of 50 mS/mm (Vth～OV) or 20 mS/mm (Vth～1V) depending on recess-etching time. These values are 10～100 times higher than those of previously reported devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaAs / MIS / Nitridation / Oxidation |
| Paper # | ED2004-37 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2004/6/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | N-channel Enhancement : Inversion Mode GaAs-MISFETs with Gate Insulating Layers Formed by Dry Oxi-Nitridation |
| Sub Title (in English) | |
| Keyword(1) | GaAs |
| Keyword(2) | MIS |
| Keyword(3) | Nitridation |
| Keyword(4) | Oxidation |
| 1st Author's Name | Mitoko TAMETOU |
| 1st Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University() |
| 2nd Author's Name | Masahide TAKEBE |
| 2nd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 3rd Author's Name | Narayan Chandra Paul |
| 3rd Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 4th Author's Name | Kouichi IIYAMA |
| 4th Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| 5th Author's Name | Saburo TAKAMIYA |
| 5th Author's Affiliation | Graduate School of Natural Science and Technology, Kanazawa University |
| Date | 2004/6/4 |
| Paper # | ED2004-37 |
| Volume (vol) | vol.104 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |