Presentation 2004/3/9
Development of FBAR Filters : In Comparison with SAW Filters (Electron Devices)
Yoshio SATOH, Tokihiro NISHIHARA, Tsutomu MIYASHITA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The technologies of FBAR (Film Bulk Acoustic Resonator) filters for Wireless Systems and their comparison with SAW technologies are discussed in this paper. First of all, the history and feature of FBAR technologies are described. As the development of technologies of FBAR, the selection and the sputtering method of the piezoelectric thin film, the structure and design methodologies of FBAR and FBAR filters, and the obtained characteristics and the comparison with SAW filters are also described in detail.
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Keyword(in English) FBAR filters / SAW filters / Wireless LAN
Paper # ED2003-237
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Committee ED
Conference Date 2004/3/9(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of FBAR Filters : In Comparison with SAW Filters (Electron Devices)
Sub Title (in English)
Keyword(1) FBAR filters
Keyword(2) SAW filters
Keyword(3) Wireless LAN
1st Author's Name Yoshio SATOH
1st Author's Affiliation Fujitsu Laboratories Ltd., Peripheral System Laboratories()
2nd Author's Name Tokihiro NISHIHARA
2nd Author's Affiliation Fujitsu Laboratories Ltd., Peripheral System Laboratories
3rd Author's Name Tsutomu MIYASHITA
3rd Author's Affiliation Fujitsu Media Devices Ltd.
Date 2004/3/9
Paper # ED2003-237
Volume (vol) vol.103
Number (no) 728
Page pp.pp.-
#Pages 6
Date of Issue