Presentation 2003/12/5
Improvement in picture quality of FEA image sensor with HARP target
Katsunori OSADA, Yoshiro TAKIGUCHI, Masakazu NANBA, Toshihisa WATABE, Saburo OKAZAKI, Norifumi EGAMI, Mitsuru TANAKA, Shigeo ITOH,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A prototype 256x192 pixel FEA (field emitter array) image sensor with the pixel size of 90μm×90μm was fabricated as a first step toward the practical sensor with small size of pixels. The experimental results showed that the prototype sensor with Spindt-type FEA could obtain a high-resolution and excellent uniformity of the picture quality by applying the magnetic focusing in addition to the conventional focusing with the mesh electrode.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) High sensitivity / Image sensor / Field emitter / HARP / Mesh electrode / Electron beam focusing
Paper # ED2003-189
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Committee ED
Conference Date 2003/12/5(1days)
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Paper Information
Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Improvement in picture quality of FEA image sensor with HARP target
Sub Title (in English)
Keyword(1) High sensitivity
Keyword(2) Image sensor
Keyword(3) Field emitter
Keyword(4) HARP
Keyword(5) Mesh electrode
Keyword(6) Electron beam focusing
1st Author's Name Katsunori OSADA
1st Author's Affiliation NHK Science & Technical Research Laboratories()
2nd Author's Name Yoshiro TAKIGUCHI
2nd Author's Affiliation NHK Science & Technical Research Laboratories
3rd Author's Name Masakazu NANBA
3rd Author's Affiliation NHK Science & Technical Research Laboratories
4th Author's Name Toshihisa WATABE
4th Author's Affiliation NHK Science & Technical Research Laboratories
5th Author's Name Saburo OKAZAKI
5th Author's Affiliation NHK Science & Technical Research Laboratories
6th Author's Name Norifumi EGAMI
6th Author's Affiliation NHK Science & Technical Research Laboratories
7th Author's Name Mitsuru TANAKA
7th Author's Affiliation Product Development Center, Futaba Corporation
8th Author's Name Shigeo ITOH
8th Author's Affiliation Product Development Center, Futaba Corporation
Date 2003/12/5
Paper # ED2003-189
Volume (vol) vol.103
Number (no) 497
Page pp.pp.-
#Pages 6
Date of Issue