Presentation | 2003/12/5 Improvement in picture quality of FEA image sensor with HARP target Katsunori OSADA, Yoshiro TAKIGUCHI, Masakazu NANBA, Toshihisa WATABE, Saburo OKAZAKI, Norifumi EGAMI, Mitsuru TANAKA, Shigeo ITOH, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A prototype 256x192 pixel FEA (field emitter array) image sensor with the pixel size of 90μm×90μm was fabricated as a first step toward the practical sensor with small size of pixels. The experimental results showed that the prototype sensor with Spindt-type FEA could obtain a high-resolution and excellent uniformity of the picture quality by applying the magnetic focusing in addition to the conventional focusing with the mesh electrode. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | High sensitivity / Image sensor / Field emitter / HARP / Mesh electrode / Electron beam focusing |
Paper # | ED2003-189 |
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Conference Information | |
Committee | ED |
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Conference Date | 2003/12/5(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Improvement in picture quality of FEA image sensor with HARP target |
Sub Title (in English) | |
Keyword(1) | High sensitivity |
Keyword(2) | Image sensor |
Keyword(3) | Field emitter |
Keyword(4) | HARP |
Keyword(5) | Mesh electrode |
Keyword(6) | Electron beam focusing |
1st Author's Name | Katsunori OSADA |
1st Author's Affiliation | NHK Science & Technical Research Laboratories() |
2nd Author's Name | Yoshiro TAKIGUCHI |
2nd Author's Affiliation | NHK Science & Technical Research Laboratories |
3rd Author's Name | Masakazu NANBA |
3rd Author's Affiliation | NHK Science & Technical Research Laboratories |
4th Author's Name | Toshihisa WATABE |
4th Author's Affiliation | NHK Science & Technical Research Laboratories |
5th Author's Name | Saburo OKAZAKI |
5th Author's Affiliation | NHK Science & Technical Research Laboratories |
6th Author's Name | Norifumi EGAMI |
6th Author's Affiliation | NHK Science & Technical Research Laboratories |
7th Author's Name | Mitsuru TANAKA |
7th Author's Affiliation | Product Development Center, Futaba Corporation |
8th Author's Name | Shigeo ITOH |
8th Author's Affiliation | Product Development Center, Futaba Corporation |
Date | 2003/12/5 |
Paper # | ED2003-189 |
Volume (vol) | vol.103 |
Number (no) | 497 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |