| Presentation | 2003/12/5 Electron Emission Characteristics of Boron-Carbon-Nitride Nanofilms Chiharu KIMURA, Shingo FUNAKAWA, Yutaka YAMAMURO, Shinichiro SAKATA, Hidekazu SHIMA, Masatoshi TERAYAMA, Takashi SUGINO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Field emission characteristics have been investigated for boron nitride (BN) film deposited by plasma-assisted chemical vapor deposition (CVD). We have proposed the model that the effective potential barrier height for Fowler-Nordheim tunneling is reduced by using BN nanofilm with a thickness of 8～10 nm, and have obtained its experimental evidence. However it is well known that BN film is not so strong for wet process. So in order to improve the property, carbon atoms are introduced during the deposition of BN film. Boron(B)-Carbon(C)-Nitride(N) films are synthesized by plasma-assisted CVD and field emission characteristics of B-C-N nanofilms are measured. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Field Emission / B-C-N Film / Nanofilm / Fowler-Nordheim Tunneling |
| Paper # | ED2003-183 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electron Emission Characteristics of Boron-Carbon-Nitride Nanofilms |
| Sub Title (in English) | |
| Keyword(1) | Field Emission |
| Keyword(2) | B-C-N Film |
| Keyword(3) | Nanofilm |
| Keyword(4) | Fowler-Nordheim Tunneling |
| 1st Author's Name | Chiharu KIMURA |
| 1st Author's Affiliation | Faculty of Electrical Engineering, Osaka University() |
| 2nd Author's Name | Shingo FUNAKAWA |
| 2nd Author's Affiliation | Faculty of Electrical Engineering, Osaka University |
| 3rd Author's Name | Yutaka YAMAMURO |
| 3rd Author's Affiliation | Faculty of Electrical Engineering, Osaka University |
| 4th Author's Name | Shinichiro SAKATA |
| 4th Author's Affiliation | Faculty of Electrical Engineering, Osaka University |
| 5th Author's Name | Hidekazu SHIMA |
| 5th Author's Affiliation | Faculty of Electrical Engineering, Osaka University |
| 6th Author's Name | Masatoshi TERAYAMA |
| 6th Author's Affiliation | Faculty of Electrical Engineering, Osaka University / |
| 7th Author's Name | Takashi SUGINO |
| 7th Author's Affiliation | |
| Date | 2003/12/5 |
| Paper # | ED2003-183 |
| Volume (vol) | vol.103 |
| Number (no) | 497 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |