| Presentation | 2003/12/5 Optimization of field emitter array fabricated using beam assisted process Katsuhisa Murakami, Naoki Yamasaki, Warepong Jarupoonphol, Yuya Tate, Mikio Takai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Au-gated Pt field emitters were fabricated using beam assisted processes. Pt emitters with different heights and gate diameters were investigated to optimize the emission current. The emitter height should be adjusted to the top-surface level of gate electrode for optimization of emission behavior. An emission angle of about 6° was obtained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | FEA (Field Emitter Array) / FIB (Focused Ion Beam) / Electron Beam Induced Deposition |
| Paper # | ED2003-182 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optimization of field emitter array fabricated using beam assisted process |
| Sub Title (in English) | |
| Keyword(1) | FEA (Field Emitter Array) |
| Keyword(2) | FIB (Focused Ion Beam) |
| Keyword(3) | Electron Beam Induced Deposition |
| 1st Author's Name | Katsuhisa Murakami |
| 1st Author's Affiliation | Graduate School of Engineering Science, Osaka University() |
| 2nd Author's Name | Naoki Yamasaki |
| 2nd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 3rd Author's Name | Warepong Jarupoonphol |
| 3rd Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 4th Author's Name | Yuya Tate |
| 4th Author's Affiliation | Graduate School of Engineering Science, Osaka University |
| 5th Author's Name | Mikio Takai |
| 5th Author's Affiliation | Research Center for Materials Science at Extreme Conditions, Osaka University |
| Date | 2003/12/5 |
| Paper # | ED2003-182 |
| Volume (vol) | vol.103 |
| Number (no) | 497 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |