| Presentation | 2003/5/9 Preparation of ultra-high B doped Si/GeB superlattice structure and its thermoelectoric properties Masahiro Kitai, Takaharu Ikeda, Kimihiro Sasaki, Tomonobu Hata, Shinichi Morita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have been growing Si/GeB superlattice structure by ion beam sputtering, and investigate its thermoelectric properties. First, to search the condition that generates large Seebeck coefficient at atmospheric temperature, we carried out to prepare Si/GeB films with changing the substrate temperature and substrate. On substrate temperature dependence, Si/GeB superlattice structure deposited at room temperature showed the largest Seebeck coefficient. However, at substrate temperature at 500℃, the Seebeck coefficient decreased rapidly. Next, Si/GeB superlattice structure was grown on SiO_2, which can prevent epitaxial growth. Its thermoelectric properties showed same properties as that on Si (100). Thus, superlattice structure itself increased Seebeck coefficient, and epitaxial growth was not always necessary. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ion beam sputtering / Si-GeB / Seebeck coefficient / thermoelectric properties |
| Paper # | ED2003-48 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of ultra-high B doped Si/GeB superlattice structure and its thermoelectoric properties |
| Sub Title (in English) | |
| Keyword(1) | ion beam sputtering |
| Keyword(2) | Si-GeB |
| Keyword(3) | Seebeck coefficient |
| Keyword(4) | thermoelectric properties |
| 1st Author's Name | Masahiro Kitai |
| 1st Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University() |
| 2nd Author's Name | Takaharu Ikeda |
| 2nd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 3rd Author's Name | Kimihiro Sasaki |
| 3rd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 4th Author's Name | Tomonobu Hata |
| 4th Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 5th Author's Name | Shinichi Morita |
| 5th Author's Affiliation | IHI Aero Space Corporation |
| Date | 2003/5/9 |
| Paper # | ED2003-48 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |