| Presentation | 2003/5/9 Thermal Agglomeration of Ultrathin SOI Structures and Effect of the Patterning Yasuhiko ISHIKAWA, Yasuhiro IMAI, Ratno NURYADI, Hiroya IKEDA, Michiharu TABE, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thermal agglomeration of ultrathin SOI (silicon-on-insulator) structures and effect of the patterning are studied. Annealing an ultrathin (001) SOI layer with the thickness below -10 nm in ultrahigh vacuum, the SOI layer deforms into Si islands with an ordered alignment in the <310> directions. In contrast, a line-patterned SOI layer, having the small line width (< 1μm) and thickness (～3nm), shows an alignment along the line edges, being independent of the in-plane crystalline directions. For the larger width and thickness, the alignment is not clear, reflecting a mixture of the above two alignments. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI / Thermal Agglomeration / Si Island / Patterning / Alignment |
| Paper # | ED2003-47 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thermal Agglomeration of Ultrathin SOI Structures and Effect of the Patterning |
| Sub Title (in English) | |
| Keyword(1) | SOI |
| Keyword(2) | Thermal Agglomeration |
| Keyword(3) | Si Island |
| Keyword(4) | Patterning |
| Keyword(5) | Alignment |
| 1st Author's Name | Yasuhiko ISHIKAWA |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Yasuhiro IMAI |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Ratno NURYADI |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Hiroya IKEDA |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Michiharu TABE |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2003/5/9 |
| Paper # | ED2003-47 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |