| Presentation | 2003/5/9 Si Microprobe Array Growth after IC Process and Application to Neural Recording Microchip Takeshi KAWANO, Yoshiko KATO, Hiroshi ISHINO, Hidekuni TAKAO, Kazuaki SAWADA, Makoto ISHIDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Si microprobe array with on-chip MOSFETs has been developed for recording activities from neurons. Selective vapor-liquid-solid (VLS) growth provides successfully Si microprobe array on Si (111) substrates. The Si probe array has been grown using catalyst-Au dot array and Si_2H_6 gas source molecular-beam-epitaxy (GS-MBE) at the gas pressure of 10^<-3> Pa, at the temperatures from 500℃ to 700℃. The MOSFETs fabricated on Si (111) substrate instead of Si (100) can be used in on-chip 1C for the VLS-Si probe array. The MOSFETs were fabricated on Si (111) substrate and Au dots were placed at drain regions of the MOSFETs in order to grow VLS-Si probes. The VLS growth at 700℃ was carried out using the substrate including MOSFETs with Au dots. At the temperature of the VLS growth, annealing substrate in vacuum chamber and Au-diffusion into the substrate could change the properties of the MOSFETs. Electrical characteristics of the MOSFETs were measured before and after the VLS process. Under the growth conditions, the MOSFETs indicated no changes on the characteristics due to the VLS growth, and these results confirmed that the VLS growth at temperature of 700℃ or less allows Si growth after 1C process. In this paper, we discuss the Si probes growth on MOSFETs. Effects of the Au diffusion and MOSFETs capability for realizing on-chip 1C for VLS-Si probe array chip. Application of the microchip with Si probe array to neural measurement was also discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | vapor-liquid-solid growth / Si probe array / multichannel microelectrode / IC / neural recording |
| Paper # | ED2003-46 |
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| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Si Microprobe Array Growth after IC Process and Application to Neural Recording Microchip |
| Sub Title (in English) | |
| Keyword(1) | vapor-liquid-solid growth |
| Keyword(2) | Si probe array |
| Keyword(3) | multichannel microelectrode |
| Keyword(4) | IC |
| Keyword(5) | neural recording |
| 1st Author's Name | Takeshi KAWANO |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Yoshiko KATO |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 3rd Author's Name | Hiroshi ISHINO |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 4th Author's Name | Hidekuni TAKAO |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 5th Author's Name | Kazuaki SAWADA |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 6th Author's Name | Makoto ISHIDA |
| 6th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| Date | 2003/5/9 |
| Paper # | ED2003-46 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |