| Presentation | 2003/5/9 Study of lateral direction growth of carbon nano tube Takayuki KOBATASHI, Tutomu INOUE, Hiroshi OKADA, Youhei HUJIMURA, Akihiro WAKAHARA, Kouji TAKIGAWA, Akira YOSHIDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed metal catalyst structure to achieve a lateral direction growth of Carbon Nano Tube (CNT). Growth conditions of CNT by chemical vapor deposition (C VD) such as flow rate of source gases and temperature, were investigated. Single CNT across two electrodes was obtained with higher growth temperature and small gas flow. From electrical characterization of CNT, P-type semiconductor like behavior of CNT was observed. Resistance of CNT become higher in lower temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | carbon nano tube / metal catalyst / position controlled formation / catalytic CVD / electrical properties |
| Paper # | ED2003-45 |
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| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of lateral direction growth of carbon nano tube |
| Sub Title (in English) | |
| Keyword(1) | carbon nano tube |
| Keyword(2) | metal catalyst |
| Keyword(3) | position controlled formation |
| Keyword(4) | catalytic CVD |
| Keyword(5) | electrical properties |
| 1st Author's Name | Takayuki KOBATASHI |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Tutomu INOUE |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 3rd Author's Name | Hiroshi OKADA |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 4th Author's Name | Youhei HUJIMURA |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 5th Author's Name | Akihiro WAKAHARA |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 6th Author's Name | Kouji TAKIGAWA |
| 6th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 7th Author's Name | Akira YOSHIDA |
| 7th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| Date | 2003/5/9 |
| Paper # | ED2003-45 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |