| Presentation | 2003/5/9 Ferroelectric Thin Films on Epitaxial γ-Al_2O_3/Si Substrates Daisuke Akai, Mikako Yokawa, Keisuke Hirabayashi, Kazuaki Sawada, Makoto Ishida, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | MF (M) IS structures were fabricated using epitaxial y-Al_2O_3/ Si substrate. Y-Al_2O_3 films were grown by chemical vapor deposition method and ferroelectric films. Pb (Zr, Ti) O_3 (PZT) were deposited by sol-gel method. In the MFIS structures, highly (001)-oriented PZT films were obtained and γ-Al_2O_3 layers were prevented interface reactions between ferroelectric materials and Si substrates. On the other hand MFMIS structures were successfully formed using Pt bottom electrodes. Using the γ-Al_2O_3 layer as an insulator, the P-E hysteresis loop was observed with remnant polarization of 14.3 μC/cm^2 and coercive field of 50 kV/cm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | γ-Al_2O_3 / Ferroelectric / MFIS / MFMIS |
| Paper # | ED2003-44 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Ferroelectric Thin Films on Epitaxial γ-Al_2O_3/Si Substrates |
| Sub Title (in English) | |
| Keyword(1) | γ-Al_2O_3 |
| Keyword(2) | Ferroelectric |
| Keyword(3) | MFIS |
| Keyword(4) | MFMIS |
| 1st Author's Name | Daisuke Akai |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Mikako Yokawa |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 3rd Author's Name | Keisuke Hirabayashi |
| 3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 4th Author's Name | Kazuaki Sawada |
| 4th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| 5th Author's Name | Makoto Ishida |
| 5th Author's Affiliation | Department of Electrical and Electronic Engineering, Toyohashi University of Technology |
| Date | 2003/5/9 |
| Paper # | ED2003-44 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |