| Presentation | 2003/5/9 Lattice Distortion near Insulator-Semiconductor Interface due to Surface Treatment of Bias Sputtering Yasunori YOSHIDA, Koichi AKIMOTO, Ayahiko ICHIMIYA, Takashi ENOMOTO, Satoshi KIKUCHI, Kazuo ITAGAKI, Hideo MAMITA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | III-V compound semiconductors are the basis of semiconductor lasers and optoelectronic devices. In device technology, bias sputtering on a semiconductor surface is often used as a surface cleaning technique. In this study, we observed strain fields near InGaP or GaAs surfaces due to such bias sputtering of Ar ion. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Interface / Strain / Synchrotron Radiation / X-Ray diffraction |
| Paper # | ED2003-43 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lattice Distortion near Insulator-Semiconductor Interface due to Surface Treatment of Bias Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Interface |
| Keyword(2) | Strain |
| Keyword(3) | Synchrotron Radiation |
| Keyword(4) | X-Ray diffraction |
| 1st Author's Name | Yasunori YOSHIDA |
| 1st Author's Affiliation | Dept. Quantum Engineering, Nagoya University() |
| 2nd Author's Name | Koichi AKIMOTO |
| 2nd Author's Affiliation | Dept. Quantum Engineering, Nagoya University |
| 3rd Author's Name | Ayahiko ICHIMIYA |
| 3rd Author's Affiliation | Dept. Quantum Engineering, Nagoya University |
| 4th Author's Name | Takashi ENOMOTO |
| 4th Author's Affiliation | Dept. of Physics, Toyota National College of Technology |
| 5th Author's Name | Satoshi KIKUCHI |
| 5th Author's Affiliation | Tsukuba Plant, Mitsubishi Chemical Corp. |
| 6th Author's Name | Kazuo ITAGAKI |
| 6th Author's Affiliation | Tsukuba Plant, Mitsubishi Chemical Corp. |
| 7th Author's Name | Hideo MAMITA |
| 7th Author's Affiliation | Tsukuba Laboratory, CACs. Inc. |
| Date | 2003/5/9 |
| Paper # | ED2003-43 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |