| Presentation | 2003/5/9 GaAs/AlGaAs quantum well growth on patterned GaAs substrate by MBE Yoshio NISHIMOTO, Masahito YAMAGUCHI, obuhiko SAWAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We grew GaAs/AlGaAs quantum well (QW) structures on two kinds of stripe-patterned structure simultaneously by molecular beam epitaxy methods. The employed stripe structures were fabricated on GaAs (100) substrate by photolithography and wet chemical etching. The stripe widths were 1 μm and 3 μm, and etching depth was 300 nm. The grown QW thickness estimated from the cathode luminescence spectra were 8 nm and 6.9 nm and the 1 μm and 3 μm stripes, respectively. This difference of thickness is due to the Ga adatoms surface diffusion from the (111) facets to the (100) surface. In 3 μm stripes on the QW thickness at the edge of the (100) surface is thicker than at the center. Therefore, we estimated the diffusion length of Ga adatoms on the surface less than 3 μm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaAs / MBE method / Patterned substrates / quantum well structure / facet |
| Paper # | ED2003-36 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/5/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | GaAs/AlGaAs quantum well growth on patterned GaAs substrate by MBE |
| Sub Title (in English) | |
| Keyword(1) | GaAs |
| Keyword(2) | MBE method |
| Keyword(3) | Patterned substrates |
| Keyword(4) | quantum well structure |
| Keyword(5) | facet |
| 1st Author's Name | Yoshio NISHIMOTO |
| 1st Author's Affiliation | Department of Electronics, Graduate School of Engineering, Nagoya University() |
| 2nd Author's Name | Masahito YAMAGUCHI |
| 2nd Author's Affiliation | Department of Electronics, Graduate School of Engineering, Nagoya University |
| 3rd Author's Name | obuhiko SAWAKI |
| 3rd Author's Affiliation | Department of Electronics, Graduate School of Engineering, Nagoya University |
| Date | 2003/5/9 |
| Paper # | ED2003-36 |
| Volume (vol) | vol.103 |
| Number (no) | 47 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |