| Presentation | 2003/4/8 Growth of Clusters in Silane Plasmas and Their Relation to Deposition of Thin Films M. SHIRATANI, K. KOGA, T. OGATA, T. KAKEYA, N. KAGUCHI, Y. WATANABE, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Cluster amount in silane plasmas employed for a-Si:H deposition can be reduced significantly by increasing discharging frequency or diluting with H_2 gas. Reduction of cluster amount brings about the decrease in a microstructure parameter of a-Si:H films, leading to the increase in a high fill factor. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cluster / Amorphous Silicon / Silane Plasma / Crystal Nano-Cluster |
| Paper # | ED2003-14,SDM2003-14,OME2003-14 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/4/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of Clusters in Silane Plasmas and Their Relation to Deposition of Thin Films |
| Sub Title (in English) | |
| Keyword(1) | Cluster |
| Keyword(2) | Amorphous Silicon |
| Keyword(3) | Silane Plasma |
| Keyword(4) | Crystal Nano-Cluster |
| 1st Author's Name | M. SHIRATANI |
| 1st Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University() |
| 2nd Author's Name | K. KOGA |
| 2nd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 3rd Author's Name | T. OGATA |
| 3rd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 4th Author's Name | T. KAKEYA |
| 4th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 5th Author's Name | N. KAGUCHI |
| 5th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 6th Author's Name | Y. WATANABE |
| 6th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| Date | 2003/4/8 |
| Paper # | ED2003-14,SDM2003-14,OME2003-14 |
| Volume (vol) | vol.103 |
| Number (no) | 4 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |