| Presentation | 2003/6/23 [Invited] Potential of SOI Devices in Sub-100-nm Technology Era : Challenging Studies (AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)) Yasuhisa Omura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | It is demonstrated conventional single-gate SOI devices are superior to double-gate SOI devices in dc and RF performances, and that the minimum channel length of single-gate SOI devices will reach a sub-20-nm range in future. Feasibility of new devices, TBJ SOI MOSFET and HOT SOI MOSFET, are also discussed quantitatively. Finally optical device applications using SOI technology are introduced because interconnection-related delay and attenuation of high-frequency signal should be overcome in the near future. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI / MOSFET / Minimum channel length / Single-gate / Double-gate / Tunneling / Radio Frequency / High temperature / Optical devices |
| Paper # | ED2003-73,SDM2003-84 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2003/6/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited] Potential of SOI Devices in Sub-100-nm Technology Era : Challenging Studies (AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)) |
| Sub Title (in English) | |
| Keyword(1) | SOI |
| Keyword(2) | MOSFET |
| Keyword(3) | Minimum channel length |
| Keyword(4) | Single-gate |
| Keyword(5) | Double-gate |
| Keyword(6) | Tunneling |
| Keyword(7) | Radio Frequency |
| Keyword(8) | High temperature |
| Keyword(9) | Optical devices |
| 1st Author's Name | Yasuhisa Omura |
| 1st Author's Affiliation | Faculty of Engineering, Kansai University() |
| Date | 2003/6/23 |
| Paper # | ED2003-73,SDM2003-84 |
| Volume (vol) | vol.103 |
| Number (no) | 159 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |