Presentation | 2003/6/6 Channel-Doped AlGaN/GaN Heterostructure Field-Effect Transistors with Al_2O_3/Si_3N_4 Gate Insulator Narihiko MAEDA, Takehiko TAWARA, Tadashi SAITO, Kotaro TSUNBAKI, Naoki KOBAYASHI, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A novel AlGaN/GaN MIS HFET has been proposed, where (1) channel doping design and (2) Al_2O_3/Si_3N_4 bi-layer gate insulator are used. A fabricated device with a gate length of 1.5 μm has exhibited a state-off-the-art current density of 1.6 A/mm and a gm of 145 mS/mm with reduced gate leakage current, suggesting that the proposed MIS HFET is promising for high-power applications. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | GaN / HFET / Channel Doping / MIS Structure / High Current Operation |
Paper # | ED2003-51 |
Date of Issue |
Conference Information | |
Committee | ED |
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Conference Date | 2003/6/6(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Channel-Doped AlGaN/GaN Heterostructure Field-Effect Transistors with Al_2O_3/Si_3N_4 Gate Insulator |
Sub Title (in English) | |
Keyword(1) | GaN |
Keyword(2) | HFET |
Keyword(3) | Channel Doping |
Keyword(4) | MIS Structure |
Keyword(5) | High Current Operation |
1st Author's Name | Narihiko MAEDA |
1st Author's Affiliation | NTT Photonics Laboratories() |
2nd Author's Name | Takehiko TAWARA |
2nd Author's Affiliation | NTT Basic Research Laboratories |
3rd Author's Name | Tadashi SAITO |
3rd Author's Affiliation | NTT Basic Research Laboratories |
4th Author's Name | Kotaro TSUNBAKI |
4th Author's Affiliation | Dept. of Engineering, Toyo University |
5th Author's Name | Naoki KOBAYASHI |
5th Author's Affiliation | Dept. of Applied Physics and Chemistry, The University of Electro-Communications |
Date | 2003/6/6 |
Paper # | ED2003-51 |
Volume (vol) | vol.103 |
Number (no) | 117 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |