Presentation 2002/10/4
Evaluation of electrical characteristics of InAlAs/InGaAs metamorphic HEMTs
Kenji Kawada, Yutaka Ohno, Shigeru Kishimoto, Kouichi Maezawa, Takashi Mizutani, Misao Takakusaki, Hirofumi Nakata,
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Abstract(in English) Metamorphic In_0.52Al_0.48As/In_0.53Ga_0.47As high electron mobility transistors (MHEMTs) were fabricated on GaAs substrates. A step graded InAlAs buffer layer was used to relax the lattice mismatch between the active layers and the substrates. The electrical characteristics of the MHEMTs were compared with those of HEMTs on InP substrates (InP HEMTs) and pseudomorphic HEMTs (PHEMTs). Present MHEMTs have exhibited superior characteristics in low-frequency (LF) noise and side-gate effect to InP HEMTs and PHEMTs. Sufficiently high current-gain cut-off-frequency of 210 GHz has been obtained for the MHEMTs with gate length of 0.1μm.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MHEMTs / metamorphic / step-graded buffer / low-frequency noise / side-gate effect / current-gain cut-off-frequency
Paper # ED2002-218
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Committee ED
Conference Date 2002/10/4(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Evaluation of electrical characteristics of InAlAs/InGaAs metamorphic HEMTs
Sub Title (in English)
Keyword(1) MHEMTs
Keyword(2) metamorphic
Keyword(3) step-graded buffer
Keyword(4) low-frequency noise
Keyword(5) side-gate effect
Keyword(6) current-gain cut-off-frequency
1st Author's Name Kenji Kawada
1st Author's Affiliation Dept. of Quantum Eng., Nagoya Univ()
2nd Author's Name Yutaka Ohno
2nd Author's Affiliation Dept. of Quantum Eng., Nagoya Univ
3rd Author's Name Shigeru Kishimoto
3rd Author's Affiliation Dept. of Quantum Eng., Nagoya Univ
4th Author's Name Kouichi Maezawa
4th Author's Affiliation Dept. of Quantum Eng., Nagoya Univ
5th Author's Name Takashi Mizutani
5th Author's Affiliation Dept. of Quantum Eng., Nagoya Univ
6th Author's Name Misao Takakusaki
6th Author's Affiliation Toda Plant, Nikko Materials
7th Author's Name Hirofumi Nakata
7th Author's Affiliation Toda Plant, Nikko Materials
Date 2002/10/4
Paper # ED2002-218
Volume (vol) vol.102
Number (no) 364
Page pp.pp.-
#Pages 5
Date of Issue