Presentation 2002/10/3
Characterization of High Breakdown Voltage AlGaN/GaN Heterojunction FETs with a Field Plate Gate
Yuji ANDO, Yasuhiro OKAMOTO, Hironobu MIYAMOTO, Tatsuo NAKAYAMA, Takashi INOUE, Masaaki KUZUHARA,
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Abstract(in English) AlGaN/GaN heterojunction FETs with a field plate gate were fabricated on SiC substrates. As the overlapping gate length (L_FP) increases, the breakdown voltage is improved. Imax>700 mA/mm and BVgd>100 V were obtained for L_FP ≧1μm. Also, the current collapse was negligibly small for the operation voltage up to 80 V. On-wafer load-pull measurements (2 GHz, CW) showed 7.1 W saturated power, 15.3 dB linear gain, and 56.0 % PAE for a 1 mm-wide device (Vdd =30 V). To our knowledge, a power density of 7.1 W/mm is the highest achieved for 1-mm class GaN-based FETs.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaN / SiC / FET / Field plate
Paper # ED2002-214
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Committee ED
Conference Date 2002/10/3(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characterization of High Breakdown Voltage AlGaN/GaN Heterojunction FETs with a Field Plate Gate
Sub Title (in English)
Keyword(1) GaN
Keyword(2) SiC
Keyword(3) FET
Keyword(4) Field plate
1st Author's Name Yuji ANDO
1st Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation()
2nd Author's Name Yasuhiro OKAMOTO
2nd Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation
3rd Author's Name Hironobu MIYAMOTO
3rd Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation
4th Author's Name Tatsuo NAKAYAMA
4th Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation
5th Author's Name Takashi INOUE
5th Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation
6th Author's Name Masaaki KUZUHARA
6th Author's Affiliation Photonic and Wireless Devices Research Laboratories, NEC Corporation
Date 2002/10/3
Paper # ED2002-214
Volume (vol) vol.102
Number (no) 363
Page pp.pp.-
#Pages 6
Date of Issue