Presentation 2002/10/3
Chemical and electronic properties of GaN and AlGaN Surfaces
Tamotsu Hashizume,
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Abstract(in English) Chemical and electronic properties of p-GaN and GaN/AlGaN surfaces after various types of wet and plasma treatments were investigated. Surface chemical properties greatly denend on natural oxides, dopants and processings. Change in surface composition affected Fermi level position, band bending and defect states at GaN-related materials.
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Keyword(in English) p-GaN / AlGaN / surface / plasma / XPS
Paper # ED2002-209
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Committee ED
Conference Date 2002/10/3(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Chemical and electronic properties of GaN and AlGaN Surfaces
Sub Title (in English)
Keyword(1) p-GaN
Keyword(2) AlGaN
Keyword(3) surface
Keyword(4) plasma
Keyword(5) XPS
1st Author's Name Tamotsu Hashizume
1st Author's Affiliation Research Center for Integrated Quantum Electronics, Hokkaido University()
Date 2002/10/3
Paper # ED2002-209
Volume (vol) vol.102
Number (no) 363
Page pp.pp.-
#Pages 6
Date of Issue