| Presentation | 2004/5/7 Influence of substrate conditions on ZnO quantum dots Satoshi NAKAGAWA, Atsushi NAKAMURA, Toru AOKI, Jiro TEMMYO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnO quantum dots have been investigated for high efficiency ultraviolet emitting devices. The ZnO quantum dots were grown on SiO_2 substrate using Remote Plasma Enhanced Metal Organic Chemical Vapor Depositon (RPE-MOCVD). Diethyl Zinc(DEZn) was used for a II group source and oxygen gas was used for a VI group source. The dots size and density were investigated by changing the growth rate and plasma treatment of substrate surface. Optical property of ZnO quantum dots was characterized by photoluminescence measurement, compared with that of ZnO film. Plasma treatment of the substrate surface has an influence on the initial formation of ZnO quantum dots. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / quantum dots / remote plasma MOCVD / plasma processing / VW mode |
| Paper # | ED2004-25,CPM2004-20,SDM2004-25 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/5/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Influence of substrate conditions on ZnO quantum dots |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | quantum dots |
| Keyword(3) | remote plasma MOCVD |
| Keyword(4) | plasma processing |
| Keyword(5) | VW mode |
| 1st Author's Name | Satoshi NAKAGAWA |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Atsushi NAKAMURA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Toru AOKI |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Jiro TEMMYO |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2004/5/7 |
| Paper # | ED2004-25,CPM2004-20,SDM2004-25 |
| Volume (vol) | vol.104 |
| Number (no) | 42 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |