| Presentation | 2004/5/7 CdSe quantum dots formation using remote plasma MOCVD Takashi KOYAMA, Toru AOKI, Jiro TEMMYO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CdSe/ZnSe and CdSe/GaAs quantum dots were grown by using remote plasma MOCVD. The thickness of CdSe layers was controlled by deposition time and growth rate. The Dots density was depended on the CdSe layer thickness. At critical thickness of CdSe layer, high density CdSe dots were formed. The CdSe dots shape was depends on the growth substrates. An annealing process had a role of the adjusting the dots size. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CdSe / ZnSe / Self-assembled Quantum Dot / remote plasma MOCVD |
| Paper # | ED2004-24,CPM2004-19,SDM2004-24 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/5/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | CdSe quantum dots formation using remote plasma MOCVD |
| Sub Title (in English) | |
| Keyword(1) | CdSe |
| Keyword(2) | ZnSe |
| Keyword(3) | Self-assembled Quantum Dot |
| Keyword(4) | remote plasma MOCVD |
| 1st Author's Name | Takashi KOYAMA |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Toru AOKI |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Jiro TEMMYO |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2004/5/7 |
| Paper # | ED2004-24,CPM2004-19,SDM2004-24 |
| Volume (vol) | vol.104 |
| Number (no) | 42 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |