| Presentation | 2004/5/6 Growth of GaN/AlN pyramid structure on Si substrate by MOVPE Yoshio HONDA, Tsuyoshi NAKAMURA, Masahito YAMAGUCHI, Nobuhiko SAWAKI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We had grown the GaN/AIN pyramid structure on (111)Si substrate by MOVPE. The non-uniformity of GaN shape was issue to solve. The reason of that was non-uniformity nucleation of AlN intermediate layer. We estimated the uniformity of GaN/AlN pyramid structure with changing the growth time of AlN intermediate layer. In the case of the thin AlN, we got uniform GaN/AlN structure. A thinner film of AlN contribute to the improvement of current-voltage characterization, we think it effective for the field emitting device. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / selectiveareagrowth / (111)Si / MOVPE / fieldemitter |
| Paper # | ED2004-18,CPM2004-13,SDM2004-18 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/5/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of GaN/AlN pyramid structure on Si substrate by MOVPE |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | selectiveareagrowth |
| Keyword(3) | (111)Si |
| Keyword(4) | MOVPE |
| Keyword(5) | fieldemitter |
| 1st Author's Name | Yoshio HONDA |
| 1st Author's Affiliation | Department of electronics engineering, Nagoya University() |
| 2nd Author's Name | Tsuyoshi NAKAMURA |
| 2nd Author's Affiliation | Department of electronics engineering, Nagoya University |
| 3rd Author's Name | Masahito YAMAGUCHI |
| 3rd Author's Affiliation | Department of electronics engineering, Nagoya University |
| 4th Author's Name | Nobuhiko SAWAKI |
| 4th Author's Affiliation | Department of electronics engineering, Nagoya University |
| Date | 2004/5/6 |
| Paper # | ED2004-18,CPM2004-13,SDM2004-18 |
| Volume (vol) | vol.104 |
| Number (no) | 41 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |