Presentation 2004/6/25
Piezoelectricity and Visible Light Emission in Super Lattice Silica Films
Satoru NOGE, Hirotaka SHIMOTORI, Takehiko UNO,
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Abstract(in English) Piezoelectricity was produced in super-lattice silica films with tetravalent metal dopants by poling. Tetravalent-metal-doped SiOa (M^<4+>:SiO_2) films were prepared on Si substrates by RF magnetron sputtering. We used germanium, titanium, and tin as doping materials. The piezoelectricity of the films was compared with the piezoelectricity of quartz. Piezoelectricity of the same order of magnitude as that in quartz was observed in the M^<4+>:SiO_2 films. However, less than a week later, the piezoelectricity disappeared almost completely in all the samples. We developed a pinning technique based on the structure of a Ge:SiO_2 - Ti:SiO_2 - Sn:SiO_2 -super-lattice. This super-lattice structure was very effective in preventing the piezoelectricity from disappearing. Furthermore, broad band visible light emission was observed in the proposed super-lattice film.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Ge-doped silica / silica / super-lattice structure / piezoelectricity / piezoelectric materials / light emission
Paper # EMD2004-24,CPM2004-33,OME2004-35
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Conference Information
Committee CPM
Conference Date 2004/6/25(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Piezoelectricity and Visible Light Emission in Super Lattice Silica Films
Sub Title (in English)
Keyword(1) Ge-doped silica
Keyword(2) silica
Keyword(3) super-lattice structure
Keyword(4) piezoelectricity
Keyword(5) piezoelectric materials
Keyword(6) light emission
1st Author's Name Satoru NOGE
1st Author's Affiliation Department of Electronic and Electronics Eng., Kanagawa Institute of Techonology()
2nd Author's Name Hirotaka SHIMOTORI
2nd Author's Affiliation Department of Electronic and Electronics Eng., Kanagawa Institute of Techonology
3rd Author's Name Takehiko UNO
3rd Author's Affiliation Department of Electronic and Electronics Eng., Kanagawa Institute of Techonology
Date 2004/6/25
Paper # EMD2004-24,CPM2004-33,OME2004-35
Volume (vol) vol.104
Number (no) 159
Page pp.pp.-
#Pages 6
Date of Issue